The role of ambient hydrocarbon species to reduce oxidation in Ru capping layers for EUVL optics mirrors
Yoshio Gomei, Y. Kakutani, H. Takase, M. Niibe, S. Terashima, T. Aoki, S. MatsunariVolume:
83
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2005.12.034
File:
PDF, 173 KB
english, 2006