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Electron-beam lithography simulation for the fabrication of...

Electron-beam lithography simulation for the fabrication of EUV masks

George P. Patsis, Nikos Tsikrikas, Ioanis Raptis, Nikos Glezos
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Volume:
83
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2006.01.040
File:
PDF, 135 KB
english, 2006
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