Interface-engineered EUV multilayer mirrors

Microelectronic Engineering 2006 Vol. 83; Iss. 4-9

Interface-engineered EUV multilayer mirrors

Sergiy Yulin, Nicolas Benoit, Torsten Feigl, Norbert Kaiser
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Volume:
83
Year:
2006
Language:
english
Pages:
3
DOI:
10.1016/j.mee.2006.01.126
File:
PDF, 239 KB
english, 2006
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