Fabrication of actuator for nanopositioning using laser...

Microelectronic Engineering 2006 Vol. 83; Iss. 4-9

Fabrication of actuator for nanopositioning using laser micro-machining

V. Lendraitis, M. Brikas, V. Snitka, V. Mizarienė, G. Raciukaitis
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Volume:
83
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2006.01.203
File:
PDF, 211 KB
english, 2006
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