Thickness-dependent glass transition temperature of thin...

Thickness-dependent glass transition temperature of thin resist films for high resolution lithography

S. Marceau, J.-H. Tortai, J. Tillier, N. Vourdas, E. Gogolides, I. Raptis, K. Beltsios, K. van Werden
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
83
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2006.01.227
File:
PDF, 509 KB
english, 2006
Conversion to is in progress
Conversion to is failed