Compact micropumping system based on LIGA fabricated microparts
M. Matteucci, F. Pérennès, B. Marmiroli, P. Miotti, L. Vaccari, A. Gosparini, A. Turchet, E. Di FabrizioVolume:
83
Year:
2006
Language:
english
Pages:
3
DOI:
10.1016/j.mee.2006.01.259
File:
PDF, 168 KB
english, 2006