Compressed-carbon dioxide (CO2) assisted nanoimprint...

Microelectronic Engineering 2006 Vol. 83; Iss. 10

Compressed-carbon dioxide (CO2) assisted nanoimprint lithography using polymeric mold

Won Mook Choi, Min Young Song, O Ok Park
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Volume:
83
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2006.02.003
File:
PDF, 312 KB
english, 2006
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