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Volume 83; Issue 10
Main
Microelectronic Engineering
Volume 83; Issue 10
Microelectronic Engineering
Volume 83; Issue 10
1
Fabrication and characterization of Zr-rich Zr-aluminate films for high-κ gate dielectric applications
Yuanpeng Li
,
Jun Zhu
,
Hongwei Liu
,
Zhiguo Liu
Journal:
Microelectronic Engineering
Year:
2006
Language:
english
File:
PDF, 313 KB
Your tags:
english, 2006
2
Influence of the metal electrode on the characteristics of thermal Ta2O5 capacitors
E. Atanassova
,
D. Spassov
,
A. Paskaleva
Journal:
Microelectronic Engineering
Year:
2006
Language:
english
File:
PDF, 187 KB
Your tags:
english, 2006
3
Nanomechanical analyses of porous SiO2 low-dielectric-constant films for evaluation of interconnect structure reliability
Shou-Yi Chang
,
Yi-Chung Huang
Journal:
Microelectronic Engineering
Year:
2006
Language:
english
File:
PDF, 647 KB
Your tags:
english, 2006
4
Printing via hot embossing of optically variable images in thermoplastic acrylic lacquer
Patrick W. Leech
,
Robert A. Lee
,
Tim J. Davis
Journal:
Microelectronic Engineering
Year:
2006
Language:
english
File:
PDF, 795 KB
Your tags:
english, 2006
5
Compressed-carbon dioxide (CO2) assisted nanoimprint lithography using polymeric mold
Won Mook Choi
,
Min Young Song
,
O Ok Park
Journal:
Microelectronic Engineering
Year:
2006
Language:
english
File:
PDF, 312 KB
Your tags:
english, 2006
6
Microstructural properties of thermally stable Ti/W/Au ohmic contacts on n-type GaN
N. Ramesha Reddy
,
V. Rajagopal Reddy
,
Chel-Jong Choi
Journal:
Microelectronic Engineering
Year:
2006
Language:
english
File:
PDF, 467 KB
Your tags:
english, 2006
7
Arrays of discrete atomic beams for sub-λ/2 lithography via dipole force
Kamlesh Alti
,
Alika Khare
Journal:
Microelectronic Engineering
Year:
2006
Language:
english
File:
PDF, 1.05 MB
Your tags:
english, 2006
8
Effect of H2O evolving from TEOS based SiO2 film on the EEPROM cell characteristic
Junghwan Lee
,
Eunyoung Chung
,
Won Moon
,
Dong Hack Suh
Journal:
Microelectronic Engineering
Year:
2006
Language:
english
File:
PDF, 160 KB
Your tags:
english, 2006
9
Development of capillaries for wire bonding of low-k ultra-fine-pitch devices
K.S. Goh
,
Z.W. Zhong
Journal:
Microelectronic Engineering
Year:
2006
Language:
english
File:
PDF, 359 KB
Your tags:
english, 2006
10
Study of X-ray lithographic conditions for SU-8 by Fourier transform infrared spectroscopy
D. Wong
,
T.L. Tan
,
P. Lee
,
R.S. Rawat
,
A. Patran
Journal:
Microelectronic Engineering
Year:
2006
Language:
english
File:
PDF, 232 KB
Your tags:
english, 2006
11
SU-8 nanocomposite photoresist with low stress properties for microfabrication applications
Sébastien Jiguet
,
Arnaud Bertsch
,
Moshe Judelewicz
,
Heinrich Hofmann
,
Philippe Renaud
Journal:
Microelectronic Engineering
Year:
2006
Language:
english
File:
PDF, 231 KB
Your tags:
english, 2006
12
Exposure parameters for MeV proton beam writing on SU-8
Vaida Auzelyte
,
Mikael Elfman
,
Per Kristiansson
,
Christer Nilsson
,
Jan Pallon
,
Natalia Arteaga Marrero
,
Marie Wegdén
Journal:
Microelectronic Engineering
Year:
2006
Language:
english
File:
PDF, 476 KB
Your tags:
english, 2006
13
Editorial Board
Journal:
Microelectronic Engineering
Year:
2006
Language:
english
File:
PDF, 32 KB
Your tags:
english, 2006
14
Contents Continued
Journal:
Microelectronic Engineering
Year:
2006
Language:
english
File:
PDF, 17 KB
Your tags:
english, 2006
15
Characterization of transient currents in HfO2 capacitors in the short timescale
Christian Monzio Compagnoni
,
Alessandro S. Spinelli
,
Andrea Bianchini
,
Andrea L. Lacaita
,
Sabina Spiga
,
Marco Fanciulli
Journal:
Microelectronic Engineering
Year:
2006
Language:
english
File:
PDF, 120 KB
Your tags:
english, 2006
16
The wire sweep analysis based on the evaluation of the bending and twisting moments for semiconductor packaging
Huang-Kuang Kung
,
Jeng-Nan Lee
,
Chin-Yu Wang
Journal:
Microelectronic Engineering
Year:
2006
Language:
english
File:
PDF, 264 KB
Your tags:
english, 2006
17
A double-layer current conduction model for high-κ gate dielectric materials with interfacial oxide or silicate layer
V. Filip
,
H. Wong
,
B. Sen
,
D. Nicolaescu
,
C.K. Sarkar
Journal:
Microelectronic Engineering
Year:
2006
Language:
english
File:
PDF, 254 KB
Your tags:
english, 2006
18
On the scaling issues and high-κ replacement of ultrathin gate dielectrics for nanoscale MOS transistors
Hei Wong
,
Hiroshi Iwai
Journal:
Microelectronic Engineering
Year:
2006
Language:
english
File:
PDF, 2.99 MB
Your tags:
english, 2006
19
Template-electrodeposition preparation and structural properties of CdS nanowire arrays
Wenbin Yang
,
Zhi Wu
,
Zhongyuan Lu
,
Xuping Yang
,
Lixian Song
Journal:
Microelectronic Engineering
Year:
2006
Language:
english
File:
PDF, 213 KB
Your tags:
english, 2006
20
An efficient wet-cleaning of SiGe virtual substrates and of thick, pure Ge layers on Si(0 0 1) after a chemical mechanical planarization step
A. Abbadie
,
J.M. Hartmann
,
C. Di Nardo
,
T. Billon
,
Y. Campidelli
,
P. Besson
Journal:
Microelectronic Engineering
Year:
2006
Language:
english
File:
PDF, 313 KB
Your tags:
english, 2006
21
Optically variable watermark (OVW) microstructures for transparent substrates
Robert A. Lee
,
Patrick W. Leech
Journal:
Microelectronic Engineering
Year:
2006
Language:
english
File:
PDF, 432 KB
Your tags:
english, 2006
22
Kinetics of chemical vapor deposition of WSix films from WF6 and SiH2Cl2: Effect of added H2, SiH4, and Si2H6
Takeyasu Saito
,
Yukihiro Shimogaki
,
Yasuyuki Egashira
,
Katsuro Sugawara
,
Katsumi Takahiro
,
Shinji Nagata
,
Sadae Yamaguchi
,
Hiroshi Komiyama
Journal:
Microelectronic Engineering
Year:
2006
Language:
english
File:
PDF, 161 KB
Your tags:
english, 2006
23
The C–V–f and G/ω–V–f characteristics of Al/SiO2/p-Si (MIS) structures
B. Tataroğlu
,
Ş. Altındal
,
A. Tataroğlu
Journal:
Microelectronic Engineering
Year:
2006
Language:
english
File:
PDF, 255 KB
Your tags:
english, 2006
24
Scaling potential of pin-type 3-D SBT ferroelectric capacitors integrated in 0.18 μm CMOS technology
L. Goux
,
D. Maes
,
J.G. Lisoni
,
H. Vander Meeren
,
V. Paraschiv
,
L. Haspeslagh
,
C. Artoni
,
G. Russo
,
R. Zambrano
,
D.J. Wouters
Journal:
Microelectronic Engineering
Year:
2006
Language:
english
File:
PDF, 281 KB
Your tags:
english, 2006
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