Fundraising September 15, 2024 – October 1, 2024 About fundraising

X-ray metrology for high-k atomic layer deposited...

X-ray metrology for high-k atomic layer deposited HfxZr1−xO2 films

Jesus J. Gallegos III, Dina H. Triyoso, Mark Raymond
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
85
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2007.02.013
File:
PDF, 642 KB
english, 2008
Conversion to is in progress
Conversion to is failed