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Improved thermal stability of Ni-silicides on Si:C epitaxial layers
V. Machkaoutsan, S. Mertens, M. Bauer, A. Lauwers, K. Verheyden, K. Vanormelingen, P. Verheyen, R. Loo, M. Caymax, S. Jakschik, D. Theodore, P. Absil, S.G. Thomas, E.H.A. GrannemanVolume:
84
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2007.05.017
File:
PDF, 628 KB
english, 2007