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Silicide pre-clean effects on NiPtSi thermal stability for...

Microelectronic Engineering 2007 Vol. 84; Iss. 11

Silicide pre-clean effects on NiPtSi thermal stability for 65 nm technologies and beyond

Susana Bonnetier, Bruno Imbert, Marco Hopstaken, David Galpin, Romain Gwoziecki, David Barge, Stéphane Zoll, Onder Anilturk, Emmanuel Sicurani, Christian Caillat, Alex Barr, Roberto Gonella, Yannick E
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Volume:
84
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2007.05.028
File:
PDF, 279 KB
english, 2007
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