Lanthanum implantation for threshold voltage control in metal/high-k devices
A. Fet, V. Häublein, A.J. Bauer, H. Ryssel, L. FreyVolume:
86
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2009.03.042
File:
PDF, 419 KB
english, 2009