Flat band voltage control on low Vt metal-gate/high-κ...

Microelectronic Engineering 2009 Vol. 86; Iss. 7-9

Flat band voltage control on low Vt metal-gate/high-κ CMOSFETs with small EOT (Invited Paper)

Albert Chin, M.F. Chang, S.H. Lin, W.B. Chen, P.T. Lee, F.S. Yeh, C.C. Liao, M.-F. Li, N.C. Su, S.J. Wang
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Volume:
86
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2009.03.075
File:
PDF, 588 KB
english, 2009
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