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Interface studies of ALD-grown metal oxide insulators on Ge and III–V semiconductors (Invited Paper)
Paul C. McIntyre, Yasuhiro Oshima, Eunji Kim, Krishna C. SaraswatVolume:
86
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2009.03.081
File:
PDF, 1006 KB
english, 2009