X-ray microbeam strain investigation on Cu–MEMS structures
Olivier Perroud, Renaud Vayrette, Christian Rivero, Olivier Thomas, Jean-Sébastien Micha, Olivier UlrichVolume:
87
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2009.05.030
File:
PDF, 449 KB
english, 2010