Double-dipole mask-synthesis using inverse lithography...

Microelectronic Engineering 2010 Vol. 87; Iss. 4

Double-dipole mask-synthesis using inverse lithography technology

Wei Xiong, Jinyu Zhang, Min-Chun Tsai, Yan Wang, Zhiping Yu
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Volume:
87
Year:
2010
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2009.08.005
File:
PDF, 482 KB
english, 2010
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