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Volume 87; Issue 4
Main
Microelectronic Engineering
Volume 87; Issue 4
Microelectronic Engineering
Volume 87; Issue 4
1
Double-dipole mask-synthesis using inverse lithography technology
Wei Xiong
,
Jinyu Zhang
,
Min-Chun Tsai
,
Yan Wang
,
Zhiping Yu
Journal:
Microelectronic Engineering
Year:
2010
Language:
english
File:
PDF, 482 KB
Your tags:
english, 2010
2
N2 effect on GaAs etching at 150 mTorr capacitively-coupled Cl2/N2 plasma
Y.H. Park
,
J.K. Kim
,
J.H. Lee
,
Y.W. Joo
,
H.S. Noh
,
J.W. Lee
,
S.J. Pearton
Journal:
Microelectronic Engineering
Year:
2010
Language:
english
File:
PDF, 624 KB
Your tags:
english, 2010
3
Gate oxide wear out using novel polysilazane-base inorganic as nano-scaling shallow trench filling
Ching Yuan Ho
,
Kai-Yao Shih
,
Jr Hau He
Journal:
Microelectronic Engineering
Year:
2010
Language:
english
File:
PDF, 446 KB
Your tags:
english, 2010
4
Kinetics of the ruthenium thin film deposition from supercritical carbon dioxide by the hydrogen reduction of Ru(tmhd)2cod
Christos F. Karanikas
,
James J. Watkins
Journal:
Microelectronic Engineering
Year:
2010
Language:
english
File:
PDF, 597 KB
Your tags:
english, 2010
5
Effect of annealing and HNO3-treatment on the electrical properties of transparent conducting carbon nanotube films
Yanli Zhao
,
Wenzhi Li
Journal:
Microelectronic Engineering
Year:
2010
Language:
english
File:
PDF, 401 KB
Your tags:
english, 2010
6
Compact meta-material transmission line balun based on meander lines structure and MEMS technology
C. Huang
,
D. Chen
,
S. Leidich
,
T. Gessner
Journal:
Microelectronic Engineering
Year:
2010
Language:
english
File:
PDF, 476 KB
Your tags:
english, 2010
7
Formation of n-channel polycrystalline-Si thin-film transistors by using retrograde channel scheme with double implantation
Miin-Horng Juang
,
C.W. Huang
,
M.-L. Wu
,
C.C. Hwang
,
J.L. Wang
,
D.C. Shye
,
S.-L. Jang
Journal:
Microelectronic Engineering
Year:
2010
Language:
english
File:
PDF, 519 KB
Your tags:
english, 2010
8
Silicon nanostencils with integrated support structures
Shawn Fostner
,
Sarah A. Burke
,
Jessica Topple
,
Jeffrey M. Mativetsky
,
Jean Beerens
,
Peter Grutter
Journal:
Microelectronic Engineering
Year:
2010
Language:
english
File:
PDF, 639 KB
Your tags:
english, 2010
9
High-k HfO2–Ta2O5 mixed layers: Electrical characteristics and mechanisms of conductivity
E. Atanassova
,
M. Georgieva
,
D. Spassov
,
A. Paskaleva
Journal:
Microelectronic Engineering
Year:
2010
Language:
english
File:
PDF, 645 KB
Your tags:
english, 2010
10
High aspect-ratio SU-8 resist nano-pillar lattice by e-beam direct writing and its application for liquid trapping
D. López-Romero
,
C.A. Barrios
,
M. Holgado
,
M.F. Laguna
,
R. Casquel
Journal:
Microelectronic Engineering
Year:
2010
Language:
english
File:
PDF, 1.34 MB
Your tags:
english, 2010
11
Thermal characteristic of Cu–Cu bonding layer in 3-D integrated circuits stack
Chuan Seng Tan
Journal:
Microelectronic Engineering
Year:
2010
Language:
english
File:
PDF, 277 KB
Your tags:
english, 2010
12
Tuning the dielectric constant of polymers using organic dopants
T. Hanemann
,
B. Schumacher
,
J. Haußelt
Journal:
Microelectronic Engineering
Year:
2010
Language:
english
File:
PDF, 302 KB
Your tags:
english, 2010
13
Investigating the effect of diamond size and conditioning force on chemical mechanical planarization pad topography
T. Sun
,
L. Borucki
,
Y. Zhuang
,
A. Philipossian
Journal:
Microelectronic Engineering
Year:
2010
Language:
english
File:
PDF, 1.45 MB
Your tags:
english, 2010
14
Laser-induced implantation of silver particles into poly(vinyl alcohol) films and its application to electronic-circuit fabrication on encapsulated organic electronics
Kun-Tso Chen
,
Yu-Hsuan Lin
,
Jeng-Rong Ho
,
J.-W. John Cheng
,
Sung-Ho Liu
,
Jin-Long Liao
,
Jing-Yi Yan
Journal:
Microelectronic Engineering
Year:
2010
Language:
english
File:
PDF, 515 KB
Your tags:
english, 2010
15
Electro-thermal behaviour of Al/SiC clamped–clamped beams
E. Mastropaolo
,
G.S. Wood
,
R. Cheung
Journal:
Microelectronic Engineering
Year:
2010
Language:
english
File:
PDF, 296 KB
Your tags:
english, 2010
16
Corrigendum to “Synthesis of gallium oxide nanowires and their electrical properties” [Microelectronic Engineering 85 (2008) 1618–1620]
Zijiong Li
,
Bin Zhao
,
Ping liu
,
Yafei Zhang
Journal:
Microelectronic Engineering
Year:
2010
Language:
english
File:
PDF, 100 KB
Your tags:
english, 2010
17
Chemically capping copper with cobalt
Lucas B. Henderson
,
John G. Ekerdt
Journal:
Microelectronic Engineering
Year:
2010
Language:
english
File:
PDF, 453 KB
Your tags:
english, 2010
18
Effect of a silicon nitride buffer layer on the electrical properties of tantalum pentoxide films
B.Y. Wang
,
Hao Wang
,
C. Ye
,
Y. Wang
,
Y. Ye
,
W.F. Wang
Journal:
Microelectronic Engineering
Year:
2010
Language:
english
File:
PDF, 495 KB
Your tags:
english, 2010
19
Effects of aging time, strain rate and solder thickness on interfacial fracture behaviors of Sn–3Cu/Cu single crystal joints
H.F. Zou
,
Z.F. Zhang
Journal:
Microelectronic Engineering
Year:
2010
Language:
english
File:
PDF, 1.18 MB
Your tags:
english, 2010
20
Fabrication of sub-micron 3-D structure using duo-mold UV-RIL process
Kang-Soo Han
,
Sung-Hoon Hong
,
Jun-Ho Jeong
,
Heon Lee
Journal:
Microelectronic Engineering
Year:
2010
Language:
english
File:
PDF, 373 KB
Your tags:
english, 2010
21
A novel printing technique for highly integrated organic devices
Björn Lüssem
,
Zoi Karipidou
,
Akos Schreiber
,
Akio Yasuda
,
Jurina M. Wessels
,
Gabriele Nelles
Journal:
Microelectronic Engineering
Year:
2010
Language:
english
File:
PDF, 1.38 MB
Your tags:
english, 2010
22
Increasing the bonding strength of chips on flex substrates using thermosonic flip-chip bonding process with nonconductive paste
Cheng-Li Chuang
,
Qing-An Liao
,
Hsun-Tien Li
,
Shi-Jie Liao
,
Guo-Shing Huang
Journal:
Microelectronic Engineering
Year:
2010
Language:
english
File:
PDF, 760 KB
Your tags:
english, 2010
23
Sensitivity and crosstalk study of the zero gap microlens used in 3.2 μm active pixel image sensors
Xiangliang Jin
,
Xiaoping Fan
,
Zhibi Liu
,
Zhangqu Kuang
,
Jun Yang
Journal:
Microelectronic Engineering
Year:
2010
Language:
english
File:
PDF, 580 KB
Your tags:
english, 2010
24
High-mobility pentacene phototransistor with nanostructured SiO2 gate dielectric synthesized by sol–gel method
S. Okur
,
F. Yakuphanoglu
,
E. Stathatos
Journal:
Microelectronic Engineering
Year:
2010
Language:
english
File:
PDF, 507 KB
Your tags:
english, 2010
25
Micro-deformation of flexible substrate for electronic devices during handling prior to lithography patterning
Iryna Yakimets
,
Marco Barink
,
Marloes Goorhuis
,
Peter Giesen
,
Francois Furthner
,
Erwin Meinders
Journal:
Microelectronic Engineering
Year:
2010
Language:
english
File:
PDF, 774 KB
Your tags:
english, 2010
26
The ultrasonic wedge/wedge bonding process investigated using in situ real-time amplitudes from laser vibrometer and integrated force sensor
H. Gaul
,
A. Shah
,
M. Mayer
,
Y. Zhou
,
M. Schneider-Ramelow
,
H. Reichl
Journal:
Microelectronic Engineering
Year:
2010
Language:
english
File:
PDF, 683 KB
Your tags:
english, 2010
27
Inkjet printed dielectrics for electronic packaging of chip embedding modules
Manfred Mengel
,
Ivan Nikitin
Journal:
Microelectronic Engineering
Year:
2010
Language:
english
File:
PDF, 528 KB
Your tags:
english, 2010
28
Ultrahigh (100%) barrier modification of n-InP Schottky diode by DNA biopolymer nanofilms
Ömer Güllü
Journal:
Microelectronic Engineering
Year:
2010
Language:
english
File:
PDF, 293 KB
Your tags:
english, 2010
29
A microfluidic system with embedded acoustic wave sensor for in situ detection of dynamic fluidic properties
Kai Zhang
,
Libo Zhao
,
Shishang Guo
,
Baoxian Shi
,
Yong Chen
,
Helen L.W. Chan
,
Yu Wang
Journal:
Microelectronic Engineering
Year:
2010
Language:
english
File:
PDF, 990 KB
Your tags:
english, 2010
30
Stack engineering of low-temperature-processing Al2O3 dielectrics prepared by nitric acid oxidation for MOS structure
Ching-Hang Chen
,
Jenn-Gwo Hwu
Journal:
Microelectronic Engineering
Year:
2010
Language:
english
File:
PDF, 319 KB
Your tags:
english, 2010
31
Enhanced efficiency in GaInP/GaAs tandem solar cells using carbon doped GaAs in tunnel junction
Chang Zoo Kim
,
Hogyoung Kim
,
Keun Man Song
,
Dong Hwan Jun
,
Ho Kwan Kang
,
Wonkyu Park
,
Chul Gi Ko
Journal:
Microelectronic Engineering
Year:
2010
Language:
english
File:
PDF, 536 KB
Your tags:
english, 2010
32
Inside Front Cover - Editorial Board
Journal:
Microelectronic Engineering
Year:
2010
Language:
english
File:
PDF, 28 KB
Your tags:
english, 2010
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