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172 nm pre-treatment for PDMS/PDMS replication
S. Möllenbeck, N. Bogdanski, A. Mayer, H.-C. Scheer, J. Zajadacz, K. ZimmerVolume:
87
Year:
2010
Language:
english
Pages:
3
DOI:
10.1016/j.mee.2009.11.054
File:
PDF, 209 KB
english, 2010