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Germanium substrate loss during thermal processing
R.J. Kaiser, S. Koffel, P. Pichler, A.J. Bauer, B. Amon, L. Frey, H. RysselVolume:
88
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2010.08.031
File:
PDF, 463 KB
english, 2011