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3D monolithic integration: Technological challenges and electrical results
M. Vinet, P. Batude, C. Tabone, B. Previtali, C. LeRoyer, A. Pouydebasque, L. Clavelier, A. Valentian, O. Thomas, S. Michaud, L. Sanchez, L. Baud, A. Roman, V. Carron, F. Nemouchi, V. Mazzocchi, H. GrVolume:
88
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2010.10.022
File:
PDF, 931 KB
english, 2011