Systematic study of shallow junction formation on germanium...

Microelectronic Engineering 2011 Vol. 88; Iss. 4

Systematic study of shallow junction formation on germanium substrates

Geert Hellings, Erik Rosseel, Trudo Clarysse, Dirch Hjorth Petersen, Ole Hansen, Peter Folmer Nielsen, Eddy Simoen, Geert Eneman, Brice De Jaeger, Thomas Hoffmann, Kristin De Meyer, Wilfried Vandervor
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Volume:
88
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2010.11.014
File:
PDF, 398 KB
english, 2011
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