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High volume nanoimprint lithography on III/V substrates: Imprint fidelity and stamp lifetime
Torbjörn Eriksson, Shoko Yamada, Prasanna Venkatesh Krishnan, Sankar Ramasamy, Babak HeidariVolume:
88
Year:
2011
Language:
english
Pages:
7
DOI:
10.1016/j.mee.2010.11.024
File:
PDF, 1.89 MB
english, 2011