Characterization of interface defects related to negative-bias temperature instability in ultrathin plasma-nitrided SiON/Si〈1 0 0〉 systems
Shinji Fujieda, Yoshinao Miura, Motofumi Saitoh, Yuden Teraoka, Akitaka YoshigoeVolume:
45
Year:
2005
Language:
english
Pages:
8
DOI:
10.1016/j.microrel.2004.02.017
File:
PDF, 333 KB
english, 2005