Theoretical investigation on hermeticity testing of MEMS...

Microelectronics Reliability 2005 Vol. 45; Iss. 3-4

Theoretical investigation on hermeticity testing of MEMS packages based on MIL-STD-883E

Yi Tao, Ajay P. Malshe
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Volume:
45
Year:
2005
Language:
english
Pages:
8
DOI:
10.1016/j.microrel.2004.08.004
File:
PDF, 159 KB
english, 2005
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