Impact of wafer charging on hot carrier reliability and...

Microelectronics Reliability 2005 Vol. 45; Iss. 3-4

Impact of wafer charging on hot carrier reliability and optimization of latent damage detection methodology in advanced CMOS technologies

D. Goguenheim, A. Bravaix, S. Gomri, J.M. Moragues, C. Monserie, N. Legrand, P. Boivin
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Volume:
45
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.microrel.2004.09.004
File:
PDF, 481 KB
english, 2005
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