Multiscale modelling of multilayer substrates

Multiscale modelling of multilayer substrates

R.L.J.M. Ubachs, O. van der Sluis, W.D. van Driel, G.Q. Zhang
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Volume:
46
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.microrel.2006.07.013
File:
PDF, 2.20 MB
english, 2006
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