Characterisation and passivation of interface defects in (1 0 0)-Si/SiO2/HfO2/TiN gate stacks
P.K. Hurley, K. Cherkaoui, S. McDonnell, G. Hughes, A.W. GroenlandVolume:
47
Year:
2007
Language:
english
Pages:
7
DOI:
10.1016/j.microrel.2006.09.030
File:
PDF, 303 KB
english, 2007