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Electrical characterization of crystalline Gd2O3 gate dielectric MOSFETs fabricated by damascene metal gate technology
Ralf Endres, Yordan Stefanov, Udo SchwalkeVolume:
47
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.microrel.2007.01.018
File:
PDF, 275 KB
english, 2007