Effects of the metal gate on the stress-induced traps in Ta2O5/SiO2 stacks
E. Atanassova, A. Paskaleva, N. NovkovskiVolume:
48
Year:
2008
Language:
english
Pages:
12
DOI:
10.1016/j.microrel.2007.11.002
File:
PDF, 274 KB
english, 2008