Packaging influences on the reliability of MEMS resonators

Microelectronics Reliability 2008 / 8 Vol. 48; Iss. 8-9

Packaging influences on the reliability of MEMS resonators

Zaal, J.J.M., van Driel, W.D., Bendida, S., Li, Q., van Beek, J.T.M., Zhang, G.Q.
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Volume:
48
Language:
english
Pages:
5
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2008.06.041
Date:
August, 2008
File:
PDF, 912 KB
english, 2008
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