Insights on trap generation and breakdown in ultra thin SiO2 and SiON dielectrics from low voltage stress-induced leakage current measurements
Nicollian, Paul E.Volume:
48
Language:
english
Pages:
7
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2008.07.011
Date:
August, 2008
File:
PDF, 897 KB
english, 2008