Near-field detection of photon emission from silicon with 30nm spatial resolution
Isakov, D., Tio, A.A.B., Geinzer, T., Phang, J.C.H., Zhang, Y., Balk, L.J.Volume:
48
Language:
english
Pages:
4
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2008.07.021
Date:
August, 2008
File:
PDF, 651 KB
english, 2008