Charging and discharging phenomena in...

Microelectronics Reliability 2008 / 8 Vol. 48; Iss. 8-9

Charging and discharging phenomena in electrostatically-driven single-crystal-silicon MEM resonators: DC bias dependence and influence on the series resonance frequency

Kalicinski, Stanislaw, Wevers, Martine, Wolf, Ingrid De
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Volume:
48
Language:
english
Pages:
6
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2008.07.024
Date:
August, 2008
File:
PDF, 235 KB
english, 2008
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