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Leakage currents and dielectric breakdown of Si1−x−yGexCy thermal oxides
A. Cuadras, B. Garrido, J.R. Morante, L. FonsecaVolume:
48
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.microrel.2008.07.061
File:
PDF, 241 KB
english, 2008