MNOS memory technology with oxynitride thin films

MNOS memory technology with oxynitride thin films

Kapoor, V.J., Turi, R.A., Xu, D., Bailey, R.S.
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Volume:
17
Language:
english
Journal:
IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part A
DOI:
10.1109/95.311745
Date:
January, 1994
File:
PDF, 634 KB
english, 1994
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