Enhanced negative substrate bias degradation in nMOSFETs...

IEEE Electron Device Letters 2003 / 05 Vol. 24; Iss. 5

Enhanced negative substrate bias degradation in nMOSFETs with ultrathin plasma nitrided oxide

Tsu-Hsiu Perng,, Chao-Hsin Chien,, Ching-Wei Chen,, Horng-Chih Lin,, Chun-Yen Chang,, Tiao-Yuan Huang,
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Volume:
24
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2003.812556
Date:
May, 2003
File:
PDF, 212 KB
english, 2003
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