Low-resistance ohmic contacts to p-type GaAs using Zn/Pd/Au...

Low-resistance ohmic contacts to p-type GaAs using Zn/Pd/Au metallization

Brooks, R.C., Chen, C.L., Chu, A., Mahoney, L.J., Mavroides, J.G., Manfra, M.J., Finn, M.C.
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Volume:
6
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/edl.1985.26217
Date:
October, 1985
File:
PDF, 336 KB
english, 1985
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