Phosphorus diffusion into silicon after vapor phase surface...

Materials Science and Engineering: B 2005 Vol. 124-125; Iss. none

Phosphorus diffusion into silicon after vapor phase surface adsorption of phosphine

Bodo Kalkofen, Marco Lisker, Edmund P. Burte
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Volume:
124-125
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.mseb.2005.08.012
File:
PDF, 214 KB
english, 2005
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