Advanced activation of ultra-shallow junctions using...

Materials Science and Engineering: B 2005 Vol. 124-125; Iss. none

Advanced activation of ultra-shallow junctions using flash-assisted RTP

W. Lerch, S. Paul, J. Niess, S. McCoy, T. Selinger, J. Gelpey, F. Cristiano, F. Severac, M. Gavelle, S. Boninelli, P. Pichler, D. Bolze
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Volume:
124-125
Year:
2005
Language:
english
Pages:
8
DOI:
10.1016/j.mseb.2005.08.047
File:
PDF, 517 KB
english, 2005
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