Excimer laser annealing of B and BF2 implanted Si
E.V. Monakhov, B.G. Svensson, M.K. Linnarsson, A. La Magna, M. Italia, V. Privitera, G. Fortunato, M. Cuscunà, L. MariucciVolume:
124-125
Year:
2005
Language:
english
Pages:
3
DOI:
10.1016/j.mseb.2005.08.059
File:
PDF, 207 KB
english, 2005