Ab initio study of the effect of hydrogen and point defects...

Ab initio study of the effect of hydrogen and point defects on arsenic segregation at Si (1 0 0)/SiO2 interfaces

Karthik Ravichandran, Wolfgang Windl
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Volume:
124-125
Year:
2005
Language:
english
Pages:
4
DOI:
10.1016/j.mseb.2005.08.094
File:
PDF, 135 KB
english, 2005
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