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Formation of buried insulating island-like SiO2 layer in silicon
A.V. Frantskevich, A.K. Fedotov, N.V. Frantskevich, A.V. Mazanik, E.I. Rau, V.S. KulinkayskasVolume:
124-125
Year:
2005
Language:
english
Pages:
4
DOI:
10.1016/j.mseb.2005.08.096
File:
PDF, 309 KB
english, 2005