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Qualitative doping area characterization of SONOS transistor utilizing scanning capacitance microscopy (SCM) and scanning spread resistance microscopy (SSRM)
Jinhee Heo, Deoksu Kim, Chung woo Kim, Ilsub ChungVolume:
124-125
Year:
2005
Language:
english
Pages:
4
DOI:
10.1016/j.mseb.2005.08.097
File:
PDF, 846 KB
english, 2005