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Characterization of strained Si structures using SIMS and visible Raman
Gary G. Goodman, Vasil Pajcini, Stephen P. Smith, Philip B. MerrillVolume:
8
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.mssp.2004.09.054
File:
PDF, 415 KB
english, 2005