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Profiling of traps in SiO2/Al2O3 gate stack by the charge pumping technique
Isodiana Crupi, Robin Degraeve, Bogdan Govoreanu, David P. Brunco, Philippe Roussel, Jan Van HoudtVolume:
9
Year:
2006
Language:
english
Pages:
3
DOI:
10.1016/j.mssp.2006.10.005
File:
PDF, 132 KB
english, 2006