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Electrical and interfacial characteristics of nanolaminate (Al2O3/ZrO2/Al2O3) gate stack on fully depleted SiGe-on-insulator
Zengfeng Di, Miao Zhang, Weili Liu, Qinwo Shen, Zhitang Song, Chenglu Lin, Anping Huang, Paul K. ChuVolume:
9
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.mssp.2006.10.011
File:
PDF, 455 KB
english, 2006