Characterization of ALD-deposited Al oxide films for high-k...

Characterization of ALD-deposited Al oxide films for high-k purposes: A chemical investigation

S.G. Alberici, A. Giussani
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Volume:
9
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.mssp.2006.10.017
File:
PDF, 509 KB
english, 2006
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