H/sub 2//O/sub 2/ plasma on polysilicon thin-film...

IEEE Electron Device Letters 1993 / 03 Vol. 14; Iss. 3

H/sub 2//O/sub 2/ plasma on polysilicon thin-film transistor

Horng Nan Chern,, Chung Len Lee,, Tan Fu Lei,
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Volume:
14
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/55.215129
Date:
March, 1993
File:
PDF, 263 KB
english, 1993
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