Praseodymium based high-k dielectrics grown on Si and SiC...

Praseodymium based high-k dielectrics grown on Si and SiC substrates

Raffaella Lo Nigro, Roberta G. Toro, Graziella Malandrino, Ignazio L. Fragalà, Vito Raineri, Patrick Fiorenza
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Volume:
9
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.mssp.2006.10.026
File:
PDF, 399 KB
english, 2006
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