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Precursor-dependent structural and electrical characteristics of atomic layer deposited films: Case study on titanium oxide
Indrek Jõgi, Kaupo Kukli, Jaan Aarik, Aleks Aidla, Jun LuVolume:
9
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.mssp.2006.10.027
File:
PDF, 558 KB
english, 2006